Add support for Instantiate for BlackBox, ExtModule, and IntrinsicModule (#3349)

* Allow IntrinsicModule to be used in Instantiate

Change a few `RawModule`s to `BaseModule`s to allow for intrinsic
modules to be used with the instantiation API.

* Add tests for Instantiate of non-RawModules

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Co-authored-by: Fabian Schuiki <fabian@schuiki.ch>
(cherry picked from commit 951f8b7c)

# Conflicts:
#	src/test/scala/chiselTests/experimental/hierarchy/InstantiateSpec.scala